High sensitivity interferometer for on-axis detection of AFM cantilever deflection
- Creator: Routley, Ben , Fleming, Andrew
- Resource Type: conference paper
- Date: 2016
A closed-loop phase-locked interferometer for wide bandwidth position sensing
- Creator: Fleming, Andrew J. , Routley, Ben , Holdsworth, John L.
- Resource Type: conference paper
- Date: 2015
A closed-loop phase-locked interferometer for wide bandwidth position sensing
- Creator: Fleming, Andrew J. , Routley, Ben S.
- Resource Type: journal article
- Date: 2015